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1、ISSCC 2025SESSION 27Sensor Interfaces27.1:A 3-Axis MEMS Gyroscope with 2.8ms Wake-Up Time Enabled by a 1.5W Always-On Drive Loop 2025 IEEE International Solid-State Circuits Conference1 of 42A 3-Axis MEMS Gyroscope with 2.8ms Wake-Up Time Enabled by a 1.5W Always-On Drive LoopLongjie Zhong1,Jinwen Z
2、hang1,Chengyue Li1,Ling Wang1,Mingsheng Zhong1,Kangkang Cai2,Ji Gao2,Tiegang Hu2,Zhangming Zhu11Xidian University,Xian,China2Silan Microelectronics,Hangzhou,China27.1:A 3-Axis MEMS Gyroscope with 2.8ms Wake-Up Time Enabled by a 1.5W Always-On Drive Loop 2025 IEEE International Solid-State Circuits C
3、onference2 of 42Outline Motivation Gyroscope ImplementationBurst-mode Always-on drive loopAlways-on drive loop with DAOCircuit implementations Measurement Results Conclusions27.1:A 3-Axis MEMS Gyroscope with 2.8ms Wake-Up Time Enabled by a 1.5W Always-On Drive Loop 2025 IEEE International Solid-Stat
4、e Circuits Conference3 of 42Motivation Always-on gyroscope is the key enabler for OIS IMU andintelligent IMUIMU for fast start-up optical image stabilization system Intelligent IMU with multiple power modeiPhone 16 Pro quickly open cameraISSCC24 F4.727.1:A 3-Axis MEMS Gyroscope with 2.8ms Wake-Up Ti
5、me Enabled by a 1.5W Always-On Drive Loop 2025 IEEE International Solid-State Circuits Conference4 of 42Start-up time and power consumption Start-up time is dominated by drive channel Power is dominated by sense channelPower consumption(A)C/VComparatorPLLMEMSDrive ChannelVPPVREFPeak DetectionAPVDRVf
6、dC/VLPFLPFSense ChannelkWake-up or start-up time(ms)ADC3000.1CP1010.10.111100.11201100100101010100.110127.1:A 3-Axis MEMS Gyroscope with 2.8ms Wake-Up Time Enabled by a 1.5W Always-On Drive Loop 2025 IEEE International Solid-State Circuits Conference5 of 42Start-up time and power consumption Start-u