SESSION 20 Sensors and Actuators for Health and Autonomy.pdf

1、ISSCC 2025SESSION 20Sensors and Actuators for Health and Autonomy20.1:A 3.5x3.5mm2 1.47mW/Ch 16-Channel MSS-CMOS Heterogeneous Multi-Modal Gas Sensor Chip Stack 2025 IEEE International Solid-State Circuits Conference1 of 25A 3.5x3.5mm21.47mW/Ch 16-Channel MSS-CMOS HeterogeneousMulti-Modal Gas Sensor

2、 Chip StackKotaro Naruse1,Naru Kato1,Takuma Matsumori1,Jun Shiomi1,Yoshihiro Midoh1,Tetsuya Hirose1,Gaku Imamura1,2,Genki Yoshikawa2,3,Constantine Sideris4,Noriyuki Miura11Osaka University,Suita,Japan2National Institute for Materials Science,Tsukuba,Japan3University of Tsukuba,Tsukuba,Japan4Universi

3、ty of Southern California,Los Angeles,CA20.1:A 3.5x3.5mm2 1.47mW/Ch 16-Channel MSS-CMOS Heterogeneous Multi-Modal Gas Sensor Chip Stack 2025 IEEE International Solid-State Circuits Conference2 of 25BackgroundIntegrated with Wearable DevicesIngestiblePillsSmart TagsFreshnessManagementIn-BodyDiagnosis

4、Breath Analysis Multi-modal gas sensors enable a wide array of applicationsMiniaturizing and reducing power consumption are required for daily life useMEMS-based gas sensors provide both low power and high sensitivity20.1:A 3.5x3.5mm2 1.47mW/Ch 16-Channel MSS-CMOS Heterogeneous Multi-Modal Gas Senso

5、r Chip Stack 2025 IEEE International Solid-State Circuits Conference3 of 25Membrane-Type Surface-Stress Sensor(MSS)Gas MoleculesPiezoresistorsStressMSSWheatstone Bridge PiezoresistorsStressStressR1R2MembraneHeavily DopedPiezoresistorReceptor Detect gas from the stress transmitted to piezoresistors*G

6、.Yoshikawa et al.,Sensors,Nov.2012,pp.15873-15887xyOpposite Polarity20.1:A 3.5x3.5mm2 1.47mW/Ch 16-Channel MSS-CMOS Heterogeneous Multi-Modal Gas Sensor Chip Stack 2025 IEEE International Solid-State Circuits Conference4 of 25Main Contributions:Maximize MSS Potential Miniaturized implementation by s