High-quality Optical Coatings by Atomic Layer Deposition_external.pdf

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1、High-quality Optical Coatings By Atomic Layer Deposition郭祥儒(Xiangru Guo)Advanced ALD,Beneq Oy9/25/2025Introduction of SRII青岛思锐智能科技股份有限公司介绍25.9.2025Acquisition of Beneq Finland.Full-scale launch of ALD business.Driving business toward more Markets such as semiconductors,optics etc.全资收购Beneq。全面优化升级ALD

2、业务。进一步开拓半导体，光学，零部件镀膜等市场。Overseas Ion Implantation Technology Cooperation.Build IMP R&D team in China.Development of ALD and IMP business lines in China.在中国建立离子注入研发团队。国内发展ALD和IMP 双业务。2018201820212021Global Business Layout25.9.2025Beneq OyEspoo,FinlandQingdao定位：行政总部业务覆盖：中国大陆及台湾、日本、新加坡等亚洲市场Boulder,USAY

3、okohama,JapanBeijing定位：国内研发中心Sales&servicesGlobal R&D,manufacture centerHeadquartersManufacture centerSales,Marketing CenterR&D CenterSales&servicesSales&servicesShanghaiTaiwan9/25/2025Optical Coatings at Beneq9/25/2025MotivationBeneq Confidential From nanoscale to macroscale conformality with ALD I

4、ntegrated structures 3D-shapesNanoscaleMacroscale Astronomical optics100 nm100 mm100 cm9/25/2025Optical Coatings at Beneq Overview Optical coatings are realized using low-loss materials:SiO2Temperature 80 CAl2O3Temperature 20 CMgF2Temperature 280 CAlF3 Temperature 150 CTiO2Temperature 70 CTa2O5Tempe

5、rature 90 CNb2O5Temperature 90 CHfO2Temperature 120 CZnSTemperature 70 CLow-index materials:High-index materials:9/25/2025Optical Coatings at Beneq Overview Typical dispersion spectra9/25/2025Optical Coatings at Beneq Overview Optical loss outside absorption edge results mainly from surface and volu

6、me scattering Very low loss can be obtained with amorphous ALD-materials(k10-7)9/25/2025Optical Coatings with Beneq ALD Beneq ALD-TiO2 is an extremely well-developed process Can be deposited on both glasses or polymers Process extremely uniform at e.g.,70 CWiW(200 mm)non-uniformity 0.4%WtW(25x200 mm