SESSION 28 Capacitive Sensor Readout.pdf

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1、ISSCC 2025SESSION 28Capacitive Sensor Readout28.1:An 18.5nF-Input-Range PM-SAR Hybrid Capacitance-to-Digital ConverterAchieving 6.1s Conversion Time at 18.1pF Input Capacitance 2025 IEEE International Solid-State Circuits Conference1 of 50An 18.5nF-Input-RangePM-SAR Hybrid Capacitance-to-Digital Con

2、verter Achieving 6.1s Conversion Timeat 18.1pF Input CapacitanceDonghyun Youn1,Kyeongwon Jeong2,Woongro Youn1,Hoyong Seong1,Yechan Park1,Sohmyung Ha3,Minkyu Je11KAIST,Daejeon,Korea2ETH Zrich,Zrich,Switzerland3New York University Abu Dhabi,Abu Dhabi,United Arab Emirates 28.1:An 18.5nF-Input-Range PM-

3、SAR Hybrid Capacitance-to-Digital ConverterAchieving 6.1s Conversion Time at 18.1pF Input Capacitance 2025 IEEE International Solid-State Circuits Conference2 of 50Outline Motivation Proposed PM-SAR Hybrid CDC Circuit Implementation Measurement Results Conclusion28.1:An 18.5nF-Input-Range PM-SAR Hyb

4、rid Capacitance-to-Digital ConverterAchieving 6.1s Conversion Time at 18.1pF Input Capacitance 2025 IEEE International Solid-State Circuits Conference3 of 50Outline Motivation Proposed PM-SAR Hybrid CDC Circuit Implementation Measurement Results Conclusion28.1:An 18.5nF-Input-Range PM-SAR Hybrid Cap

5、acitance-to-Digital ConverterAchieving 6.1s Conversion Time at 18.1pF Input Capacitance 2025 IEEE International Solid-State Circuits Conference4 of 50Microfluidic ChannelPolymeric membraneDielectricInsulatorPrinciples of Capacitive SensingPressureAir flowHumidityCytometryC1C2Absorptionor evaporation

6、InflowDielectricInsulatordACS=Cd1C 28.1:An 18.5nF-Input-Range PM-SAR Hybrid Capacitance-to-Digital ConverterAchieving 6.1s Conversion Time at 18.1pF Input Capacitance 2025 IEEE International Solid-State Circuits Conference5 of 50Challenges in CDC DesignCS A d=Capacitance=Permittivity=Area=DistancedA