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压阻式触觉传感器结构与实物

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所属报告：

人形机器人行业系列深度报告一：智能具身创启未来纪元-250518（70页）.pdf

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从原理上，触觉传感器可分为压阻式、电容式、电感式、压电式、光电式等类别，其中电阻式、电容式最为常见：1）压阻式：根据半导体材料的压阻效应而制成的器件，其基片可直接作为测量传感元件，扩散电阻在基片内接成电桥形式。当基片受到外力作用而产生形变时，各电阻值将发生变化，电桥就会产生相应的不平衡输出。优势是有较高的灵敏度，过载承受能力强；劣势是压敏电阻漏电流稳定性差。同时体积大，不易实现微型化；2）电容式：在外力作用下使两极板间的相对位置发生变化，从而导致两级间电容变化，通过检测电容的变化量实现检测。优势是测量量程大，线性度好，制造成本低，实时性高；劣势是物理尺寸大，不易集成化，易受噪声影响，稳定性差；3）电感式：利用电磁感应原理将压力作用转换为线圈的自感系数和互感系数的变化，并将磁场的变化通过磁路系统转化为电信号，从而检测接触面上的压力信号。优势是制造成本低，测试量程范围大；劣势是磁场分布难以控制，分辨率低、一致性差；4）压电式：基于压电效应的传感器，是一种自发电式和机电转换式传感器。优势是动态范围宽，有较好的耐用性；劣势是易受热响效应影响；5）光电式：基于全内反射原理进行研制的，通常由光源和光电探测器构成。当施加在界面上的压力发生变化时，传感器敏感元件的反射强度和光源频率也会相应发生变化。优势是灵敏度高，响应快，有较高的空间分辨率，且受电磁干扰影响较小；劣势是多力共同作用时线性较差，数据实时性差以及标定困难。

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