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LPCVD存在问题及解决措施
LPCVD存在问题及解决措施
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所属报告：
捷佳伟创-公司研究报告-光伏领域三线布局助力设备龙头业绩长虹-240103（42页）.pdf
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图23.沉积工艺以LPCVD与PECVD为主
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2024-02-20
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LPCVD和PECVD镀膜优劣势对比
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2023-04-12
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气场示意图（LPCVD）
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2023-04-12
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热场示意图（LPCVD）
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2023-04-12
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LPCVD设备示意图
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其它
2023-02-13
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TOPCon主要工艺路线流程（LPCVD/PECVD/PVD）
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行业数据
2023-02-13
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LPCVD、PECVD、PVD三条工艺路线对比
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行业数据
2023-02-13
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制备多晶硅掺杂膜，LPCVD/PECVD/PVD工艺对比
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行业数据
2023-02-13
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对于多晶硅膜沉积，LPCVD/PECVD/PVD三条路线对比
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行业数据
2023-02-13
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酸刻蚀速度对比：PECVD<LPCVD<热氧化法
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行业数据
2023-02-13
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TOPCon电池LPCVD和PECVD法CAPEX对比
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行业数据
2022-10-27
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PERC升级TOPCon工艺路线LPCVD/PECVD
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行业数据
2022-09-08
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图表20LPCVD与PECVD工艺流程
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行业数据
2022-09-06
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PERC升级TOPCon工艺路线LPCVD/PECVD
fCBQRVJD5bel6Im65q2l6aqkIHwgVE9QQ29u5bel6Im65q2l6aqkIHwKfCAtLS0gfCAtLS0gfAp8IOWItue7kiB8IOWItue7kiB8Cnwg56O35ompIHwg56G85ompIHwKfCDmv4DlhYlTRSB8IOWIu+iagCB8Cnwg5Yi76JqAL+aKm+WFiSB8IExQQ1ZEIHwKfCDng63msKcgfCDno7fmiakgfAp8IOiDjOmdokFJMk8zL1NpeE55IHwg5Y6757uV6ZWAL+i+uee8mOe7nee8mCB8Cnwg5q2j6Z2iU2l4TnkgfCDmraPpnaJBSTJPMy9TaXhOeSB8CnwgTENPIHwg6IOM6Z2iU2l4TnkgfAp8IOS4neWNsCbng6fnu5MgfCDkuJ3ljbAm54On57uTIHwKCui1hOaWmeadpea6kO+8muaZruS5kOaWsOiDvea6kO+8jOawkeeUn+ivgeWIuOeglOeptumZog==
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2022-09-06
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缺点：有较为严重的绕镀问题，原位掺杂难，成膜速率低，通常需二次磷扩，能耗大，石英耗材成本较高，不同尺寸硅片兼容性差。
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捷佳伟创-公司研究报告-光伏领域三线布局助力设备龙头业绩长虹-240103（42页）.pdf
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表2021A2022A2023E2024E2025E主要指标2021A2022A2023E2024E2025E
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