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按刻蚀材料分各类刻蚀特征-行业数据

按刻蚀材料分各类刻蚀特征
按刻蚀材料分各类刻蚀特征
根据作用机理，干法刻蚀主要分为等离子刻蚀，离子溅射刻蚀，反应离子刻蚀三种，运用在不同的工艺步骤中，根据被刻蚀的材料类型，干法刻蚀则可分为金属刻蚀、介质刻蚀与硅刻蚀。其中，介质刻蚀和硅刻蚀市场规模总占比超 90%，两者广泛应用于逻辑、存储器等芯片制造中。
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所属报告： 北方华创-公司研究报告-国产半导体装备脊梁打造平台型龙头-250212（36页）.pdf
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